Robust Control Design Based on Perturbation Cancellation for Micro-Positioning Design with Hysteresis

Based on the superiority of piezoelectric elements, including lightweight, high electric mechanical transformation efficiency and a quick response time, piezoelectric-based micro-positioning actuator is developed in this investigation. For eliminating effects hysteresis modeling uncertainties that appeared actuator, nonlinear adaptive fuzzy robust control design with perturbation cancellation ability proposed for to achieve positioning resolution 1 μm. Structurally, methodology contains two particular parts: universal approximator compensator, which are employed cancel caused by perturbed parts mitigate approximation error between approximator, respectively. From both numerical simulations real validations, performs promising performance micrometer level.